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Recent advances in UV and VUV cleaning of optical materials

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5 Author(s)
Kane, D.M. ; Dept. of Phys., Macquarie Univ., Sydney, NSW, Australia ; Fernandes, A.J. ; Hirschausen, D. ; Pleasants, S.
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An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using short-pulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.

Published in:

Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on

Date of Conference:

11-13 Dec. 2002