Metallo-organic decomposition derived Sr/sub 0.95/Ca/sub 0.05/ZrO/sub 3/ oxide thin films on Pt/Ti/SiO/sub 2//Si substrate

Dielectric thin films of strontium zirconate doped with 5 mol% calcium were prepared on Pt/Ti/SiO/sub 2//Si substrate by the metallo-organic decomposition (MOD) wet chemical technology followed by annealing at different temperatures in flowing oxygen atmosphere. Those prepared Sr/sub 0.95/Ca/sub 0.05/ZrO/sub 3/ thin films were investigated using differential thermal analysis (DTA) and thermogravimetric analysis (TGA), X-ray diffraction (XRD), UV optical reflection spectroscopic measurement, and sweeping frequency dependence of the dielectric constants and losses to study their structural development, optical band gaps, and dielectric properties. The study is aimed at seeking a possibility for an application in the area of high-K dielectrics.