Referenced Items are not available for this document.
A multi-layered surface acoustic wave (SAW) transducers have been employed for nitrogen dioxide gas sensing applications. The structure composes of a SiO2 guiding layer deposited on a 90° rotated ST-cut quartz crystal substrate with a thin film of copper phthalocyanine acting as the selective layer. The dominant mode of acoustic propagation in the sensor is a combination of mainly a shear and a longitudinal displacement types. Such a structure has the advantage of confining the acoustic wave energy to the surface of the device, which increases the sensitivity of the system.
Published in:
Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
Date of Conference: 11-13 Dec. 2002
- Page(s):
- 165 - 168
- ISSN :
- 1097-2137
- Print ISBN:
- 0-7803-7571-8
- INSPEC Accession Number:
- 7977200
- Digital Object Identifier :
- 10.1109/COMMAD.2002.1237218
- Product Type:
- Conference Publications
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
