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A layered SAW based NO2 sensor with a copper phthalocyanine selective layer

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7 Author(s)
Ippolito, S.J. ; Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia ; Kalantar-Zadeh, K. ; Wlodarski, W. ; Galatsis, K.
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A multi-layered surface acoustic wave (SAW) transducers have been employed for nitrogen dioxide gas sensing applications. The structure composes of a SiO2 guiding layer deposited on a 90° rotated ST-cut quartz crystal substrate with a thin film of copper phthalocyanine acting as the selective layer. The dominant mode of acoustic propagation in the sensor is a combination of mainly a shear and a longitudinal displacement types. Such a structure has the advantage of confining the acoustic wave energy to the surface of the device, which increases the sensitivity of the system.

Published in:

Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on

Date of Conference:

11-13 Dec. 2002

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