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Optical scanner prepared by wafer bending technique

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4 Author(s)
Ishimori, M. ; Dept. of Machine Intelligence & Syst. Eng., Tohoku Univ., Sendai, Japan ; Jong-Hyeong Song ; Sasaki, M. ; Hane, K.

In this study, an optical scanner driven by the vertical comb drive actuator is prepared using the wafer bending technique. The device structure is presented, as well as the results of the measured mirror rotation angle, frequency characteristics and transient response.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003

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