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GaAs-based microelectromechanical waveguide switches monolithically integrated with lasers and detectors

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4 Author(s)
Cich, M.J. ; Sandia Nat. Labs., Albuquerque, NM, USA ; Lopez, G.M. ; Tigges, C. ; Spahn, O.B.

In this paper, the monolithic integration of edge-emitting lasers and detectors with MEMS waveguide switches is demonstrated. Fabrication issues, such as choice of materials and critical design dimensions are discussed. Details of device performance are also given.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003