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Browse Conference Publications > Optical MEMS, 2003 IEEE/LEOS ... Help

Torsional mirror with X-shaped cross-sectional torsional beam

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5 Author(s)
Yasuda, S. ; Canon Res. Center, Canon Inc., Tokyo, Japan ; Kato, T. ; Torashima, K. ; Shimada, Y.
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The development of a MEMS torsional mirror with X-shaped cross-sectional torsional beam is presented in this paper. The torsional resonant mode of the torsional mirror was designed to be the lowest resonant mode. Therefore, vertical and horizontal movements of the mirror were reduced. This torsional mirror has been fabricated using anisotropic etching from both sides of Si (100) wafer.

Published in:
Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference: 18-21 Aug. 2003

Page(s):
133 - 134
Print ISBN:
0-7803-7830-X
INSPEC Accession Number:
7977994
Digital Object Identifier :
10.1109/OMEMS.2003.1233502
Product Type:
Conference Publications

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