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A low-loss 1 × 2 MEMS optical switch with novel three-degrees-of-freedom actuator is demonstrated. The actuator can achieve in-plane, out-of-plane, and rotational motion. Therefore, low-loss switching performance can be obtained through these flexible fine adjustments. 0.6 dB insertion loss with long-term repeatability as low as ±0.04 dB is demonstrated for over one million cycles, and switching speed as fast as 0.8 ms is achieved with 5-V drive.
Optical MEMS, 2003 IEEE/LEOS International Conference on
Date of Conference: 18-21 Aug. 2003