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Browse Conference Publications > Optical MEMS, 2003 IEEE/LEOS ... Help

A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency

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2 Author(s)
Il-Joo Cho ; Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea ; Euisik Yoon

A new three-axis electromagnetically-actuated micromirror using an SOI wafer is proposed and fabricated. This micromirror can be used for optical switches, optical scanners and alignment modules with low voltage operation and high coupling efficiency due to three degrees of freedom.

Published in:
Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference: 18-21 Aug. 2003

Page(s):
123 - 124
Print ISBN:
0-7803-7830-X
INSPEC Accession Number:
7977990
Digital Object Identifier :
10.1109/OMEMS.2003.1233497
Product Type:
Conference Publications

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