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Fringe-field-activated SOI tilting mirrors

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14 Author(s)
Greywall, D.S. ; Lucent Technol. Bell Labs, Murray Hill, NJ, USA ; Chien-Shing Pai ; Sang-Hyun Oh ; Chorng-Ping Chang
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This paper discusses a significant improvement of the SOI process that can be implemented in various manners and that remedies many problems of earlier fabrication schemes. In particular the new MOEMS structures are monolithic, do not exhibit rotational snapdown, have electrical shielding between channels, and have activation voltages less than or comparable to parallel plate devices. The approach is discussed in terms of an application requiring a linear array of closely-spaced cantilever mirrors.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003