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The study on SU-8 micro cylindrical lens for laser induced fluorescence application

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8 Author(s)
Jerwei Hsieh ; Precision Intsrum. Dev. Center, Taiwan ; Chun-Jen Weng ; Hui-Hsiung Lin ; Hung-Ling Yin
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In this study, a new method to realize both v-MCL (micro cylindrical lens) and h-MCL using SU-8 as lens material is demonstrated. The characterization results showed that SU-8 MCLs could not only have acceptable optical quality but function well for collimating and focusing. The advantages of fast prototyping and easy integrating of SU-8 MCLs would make itself a useful tool in many applications.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003