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An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror

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5 Author(s)
Tsaur, J. ; Nat. Inst. of Adv. Ind. Sci. & Technol., Japan ; Kobayashi, T. ; Ichiki, M. ; Maeda, R.
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This paper aims to improve the sol-gel process and demonstrate the integrated fabrication with the use of SOI wafers. The piezoelectric properties of the PZT and the silicon-based micromirror with a plane structure are also presented.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003