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Browse Conference Publications > Optical MEMS, 2003 IEEE/LEOS ... Help

Temperature stability of the frequency of a resonant micro scanning mirror

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4 Author(s)
Wolter, A. ; Fraunhofer-Inst. Photonische Mikrosysteme, Dresden, Germany ; Korth, H. ; Schenk, H. ; Lakner, H.

Investigation of our bulk-micromachined resonant micro MEMS-scanner revealed that the eigen-frequency of 250 Hz varied within a range of only 0.1% during a temperature cycle between 10°C and 60°C at ambient atmosphere. Results of the study show that packaging is crucial.

Published in:
Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference: 18-21 Aug. 2003

Page(s):
55 - 56
Print ISBN:
0-7803-7830-X
INSPEC Accession Number:
7977965
Digital Object Identifier :
10.1109/OMEMS.2003.1233464
Product Type:
Conference Publications

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