Referenced Items are not available for this document.
A MEMS based, resonant mode, thinned single crystal silicon scanning mirror stiffened by a skeleton truss and actuated via multi-layer vertical comb-drives has been realized utilizing a self-aligned DRIE fabrication process.
Published in:
Optical MEMS, 2003 IEEE/LEOS International Conference on
Date of Conference: 18-21 Aug. 2003
- Page(s):
- 12 - 13
- Print ISBN:
- 0-7803-7830-X
- INSPEC Accession Number:
- 7970735
- Digital Object Identifier :
- 10.1109/OMEMS.2003.1233443
- Product Type:
- Conference Publications
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