Fabrication of Nd-Fe-B thick-film magnets by high-speed PLD method

The high-speed pulsed laser deposition (PLD) method resulted in Nd-Fe-B film magnets with a thickness of more than several tens of micrometers in 1 h. Targets were ablated with a pulse laser at the repetition rate of 30 Hz, and the films were deposited on Ta substrates. Control of a distance between a target and a substrate provided a high deposition rate of 5-20 nm/s. The average values of coercivity and the remanence of the films were approximately 1000 kA/m and 0.55 T, respectively, in the thickness range of 10-80 /spl mu/m, and the fabrication of the high-speed PLD method enabled us to obtain a sample with the maximum energy product of 77 kJ/m/sup 3/. A film with the thickness of approximately 120 /spl mu/m was fabricated by suppressing peeling from a substrate. In addition, the films with the thickness of 40-50 /spl mu/m were prepared on Fe substrates with a Ta buffer layer.