By Topic

A fabrication laboratory course based on GaAs MESFETs

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Roenker, K.P. ; Dept. of Electr. & Comput. Eng. & Comput. Sci., Cincinnati Univ., OH, USA ; Flenniken, R. ; Kosel, Peter B.

This paper describes the organization and operation of an introductory, dual level (senior/graduate) laboratory course on semiconductor device processing that is based on the fabrication and testing of GaAs MESFETs. The course is organized into a weekly lecture with a corresponding laboratory session. Over the period of one quarter, the students are led through a four mask process for fabricating n-channel GaAs MESFETs. The last three weeks of the course are utilized to perform electrical characterization of the devices and test structures incorporated in the test chip. This paper provides a description of the breakdown of the fabrication process in weekly increments, the topics covered in the accompanying lecture, resource materials provided to the student, methods used for student assessment, facilities and staffing requirements, and student capacity.

Published in:

University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial

Date of Conference:

30 June-2 July 2003