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Optically-powered wireless transmitter for high-temperature MEMS sensing and communication

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3 Author(s)
Suster, M. ; Dept. of EECS, Case Western Reserve Univ., Cleveland, OH, USA ; Ko, W.H. ; Young, D.J.

A high-temperature low-power silicon-tunnel-diode-based oscillator transmitter with an on-board optical power converter is proposed for harsh environment MEMS sensing and wireless data transmission applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a coil loop serving as the inductor of the LC tank resonator and also as a transmitting antenna. A GaAs photodiode converts an incoming laser beam to electrical energy to power the prototype. The system achieves a telemetry performance up to 250/spl deg/C over a distance of 1.5 meters with a transmitter power consumption of approximately 60 /spl mu/W.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003