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A high-temperature low-power silicon-tunnel-diode-based oscillator transmitter with an on-board optical power converter is proposed for harsh environment MEMS sensing and wireless data transmission applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a coil loop serving as the inductor of the LC tank resonator and also as a transmitting antenna. A GaAs photodiode converts an incoming laser beam to electrical energy to power the prototype. The system achieves a telemetry performance up to 250/spl deg/C over a distance of 1.5 meters with a transmitter power consumption of approximately 60 /spl mu/W.