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This report presents a technique for multichannel electrode of penetrating Si microprobe array with on-chip integrated circuits (ICs) for use in neuroscience and biomedical engineering. Penetrating microelectrodes can be used for multipoint neural recording as well as stimulation for neurons located in the neuronal tissue. Penetrating Si probes were successfully fabricated at predetermined sites on ICs by a selective vapor-liquid-solid (VLS) Si growth. The length of the Si probe was controlled in the VLS growth, which allowed required length with same diameter of one neuron or less for in-vivo study. On-chip ICs was realized in order to site-selection for many probes. The Si probes on the circuits were spaced on 100 /spl mu/m in the array, which can provide a high-density multichannel penetrating electrode.