Referenced Items are not available for this document.
The performance of an optical IR microspectrometer fabricated in silicon using IC-compatible micromachining is presented. The components are distributed over two silicon wafers. One contains an aluminum-based grating and the other an array of poly-silicon thermocouples with readout circuits. The optical path is defined after low-temperature aligned wafer-to-wafer bonding. Design considerations, fabrication and performance are presented. Measurements confirm an IR operating range between 1 and 9 /spl mu/m and a half-power spectral resolution of 0.5 /spl mu/m.
Published in:
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
(Volume:2
)
Date of Conference: 8-12 June 2003
- Page(s):
- 1610 - 1613 vol.2
- Print ISBN:
- 0-7803-7731-1
- INSPEC Accession Number:
- 7937447
- Conference Location :
- Boston, MA, USA
- Digital Object Identifier :
- 10.1109/SENSOR.2003.1217089
- Product Type:
- Conference Publications
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