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Micromachined two dimensional resistor arrays for determination of gas parameters

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7 Author(s)
van Baar, J.J. ; MESA Res. Inst., Twente Univ., Enschede, Netherlands ; Verweij WA ; Dijkstra, M. ; Wiegerink, R.J.
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A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003