By Topic

A multi-layer plastic/glass technology for microfluidic systems with integrated functionality

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Han, A. ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Graff, M. ; Wang, O. ; Mohanty, S.K.
more authors

A multi-layer plastic/glass technology has been developed for microfluidic systems with integrated functionality. Hot embossing and heat staking of plastics, microstenciling of electrodes, and stereolithography (SLA) was combined with conventional MEMS fabrication techniques to realize the system. The approach enables the use of multiple plastic/glass materials in a single system, provides a solution for the integration of electrical functionality throughout the system, provides a mechanism for the inclusion of microvalves, and provides an interconnect technology for interfacing fluids and electrical components between the macro and the micro worlds.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003