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A multi-layer plastic/glass technology has been developed for microfluidic systems with integrated functionality. Hot embossing and heat staking of plastics, microstenciling of electrodes, and stereolithography (SLA) was combined with conventional MEMS fabrication techniques to realize the system. The approach enables the use of multiple plastic/glass materials in a single system, provides a solution for the integration of electrical functionality throughout the system, provides a mechanism for the inclusion of microvalves, and provides an interconnect technology for interfacing fluids and electrical components between the macro and the micro worlds.
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 (Volume:2 )
Date of Conference: 8-12 June 2003