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Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly

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7 Author(s)
M. Ishizuka ; Dept. of Electron., Inf. & Commun. Eng., Waseda Univ., Tokyo, Japan ; M. Abe ; H. Houjou ; S. Shoji
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3-D metal embedded structure was realized by folding PDMS structure. Accurate angle of 90 degree between the each electrodes are obtained using the guide structure. A fluoro resin on the metal layer was used to avoid the clack resulting from residual stress and also to protect from organic solvent generating during photolithography. By applying high electric field of 2000 V/cm on facing electrodes, the static field effect on styrene polymer micro sphere is confirmed.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003