Referenced Items are not available for this document.
Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (<150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.
Published in:
Applied Superconductivity, IEEE Transactions on
(Volume:13
,
Issue:
2
)
Date of Publication: June 2003
- Page(s):
- 135 - 137
- ISSN :
- 1051-8223
- INSPEC Accession Number:
- 7711524
- Digital Object Identifier :
- 10.1109/TASC.2003.813664
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 15 July 2003
- Issue Date :
- June 2003
- Sponsored by :
- The IEEE Council on Superconductivity
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