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Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (<150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.
Date of Publication: June 2003