Referenced Items are not available for this document.
This paper reports on the design, fabrication, and testing of a novel analog MEMS varactor with measured tuning range of 300%. The proposed electrostatically actuated varactor is based on a parallel-plate approach and is best suited for microwave/millimeter-wave applications. The measured capacitance values are in the range of 40-160 fF and are achieved with DC voltages of 20-34 V. The proposed varactor has the additional advantages of very high resonant frequency (its series measured parasitic inductance is 9 pH) and high quality factor (higher than 80 at 40 GHz).
Published in:
Microwave Symposium Digest, 2003 IEEE MTT-S International
(Volume:3
)
Date of Conference: 8-13 June 2003
- Page(s):
- 1793 - 1796 vol.3
- ISSN :
- 0149-645X
- Print ISBN:
- 0-7803-7695-1
- INSPEC Accession Number:
- 7686295
- Conference Location :
- Philadelphia, PA, USA
- Digital Object Identifier :
- 10.1109/MWSYM.2003.1210488
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