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A ±1-g dual-axis linear accelerometer in a standard 0.5-μm CMOS technology for high-sensitivity applications

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7 Author(s)
Baschirotto, A. ; Dept. of Innovation Eng., Univ. of Lecce, Italy ; Gola, A. ; Chiesa, E. ; Lasalandra, E.
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A dual-axis linear accelerometer, composed of a dual-axis acceleration sensor using a single proof mass to detect x- and y-axis acceleration and the relative fully integrated electronics front-end realized in a standard 0.5-μm CMOS technology, is proposed. The overall device features a full scale of ±1g and a sensitivity of 200 μg. No external components are required since an internal switched-capacitor low-pass filter limits the output signal band to 30 Hz. The dual-axis sensor is packaged with the electronics. In the final device, only four pins are active, plus a test pin. The device sensitivity is on-chip factory trimmed. This sensitivity is adjusted with a total accuracy of ±2.5%. The device is able to detect a minimum signal of 200 μg (which is about 80 dB lower than its full scale) and consumes 45 mW from a single 5-V supply.

Published in:

Solid-State Circuits, IEEE Journal of  (Volume:38 ,  Issue: 7 )