By Topic

Life cycle inventory development for wafer fabrication in semiconductor manufacturing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Murphy, C.F. ; Texas Univ., Austin, TX, USA ; Laurent, J.-P. ; Allen, D.T.

Process-based, generic, parametric modules are used to manage wafer fabrication life-cycle inventory data in order to stream-line life cycle analysis activities, accommodate rapidly changing technologies, and accurately reflect the highly significant role that wafer fabrication processes have in the life cycle of an integrated circuit.

Published in:

Electronics and the Environment, 2003. IEEE International Symposium on

Date of Conference:

19-22 May 2003