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Life cycle inventory development for wafer fabrication in semiconductor manufacturing

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3 Author(s)
Murphy, C.F. ; Texas Univ., Austin, TX, USA ; Laurent, J.-P. ; Allen, D.T.

Process-based, generic, parametric modules are used to manage wafer fabrication life-cycle inventory data in order to stream-line life cycle analysis activities, accommodate rapidly changing technologies, and accurately reflect the highly significant role that wafer fabrication processes have in the life cycle of an integrated circuit.

Published in:

Electronics and the Environment, 2003. IEEE International Symposium on

Date of Conference:

19-22 May 2003