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A heterostructured photonic-crystal functional chip consisting of a resonator and waveguides is fabricated by a simple "autocloning" process. First, we prepare a substrate with different corrugation patterns by electron beam lithography and dry etching, and Ta/sub 2/O/sub 5/-SiO/sub 2/ multilayers are successively formed upon the substrate. An in-line resonator is fabricated and characterized by fiber-in-fiber-out measurement, and a resonance peak with Q=270 is demonstrated. The future outlook for the technology is also discussed.
Published in:
Photonics Technology Letters, IEEE
(Volume:15
,
Issue:
6
)
Date of Publication: June 2003
- Page(s):
- 816 - 818
- ISSN :
- 1041-1135
- INSPEC Accession Number:
- 7650592
- Digital Object Identifier :
- 10.1109/LPT.2003.811334
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 21 May 2003
- Issue Date :
- June 2003
- Sponsored by :
- IEEE Photonics Society
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