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A new method to determine the work-function difference and its application to calibrate the boron-segregation coefficient

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2 Author(s)
Pole-Shang Lin ; Electron. Res. & Service Organ., Hsin-chu, Taiwan ; Chia-Haur Chang

The authors present a technique to determine the work-function difference from a plot of the threshold voltage (V/sub T/) versus oxide thickness (T/sub ox/) curve. The extraction errors caused by the electrical characteristics of the oxide and the SiO/sub 2//Si interface can be minimized by the V/sub T/-T/sub ox/ technique. The boron segregation coefficient can be calibrated from the slope of the V/sub T/-T/sub ox/ curve. Comparisons between the experimental data and simulation results are made, and good agreement is obtained.<>

Published in:

Electron Device Letters, IEEE  (Volume:12 ,  Issue: 11 )