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Determining the inductance of thin film superconducting structures accurately is extremely important in sub-Terahertz superconducting logic circuits. For numeric analysis, both the structure and ground plane need to be sufficiently segmented. The method of images significantly reduces the number of segments, but the selection of the position of the reflection plane is critical. The influence of the position of the reflection plane on inductance is investigated, and results presented. A study of segmentation and filamentation is also made, and these results used to calculate the inductance of a complex three-dimensional structure.