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New micromachined membrane switches in silicon technology

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6 Author(s)

Presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 μm and has been observed to move about 0.7 μm over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA.

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Components and Packaging Technologies, IEEE Transactions on  (Volume:25 ,  Issue: 3 )