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Titanium Printed Capacitors for Microminiaturization

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2 Author(s)
F. Huber ; Republic Aviation Corporation,N.Y. ; J. Bloxsom

It is shown in this paper that by an appropriate cleaning and forming procedure titanium metal can be anodically oxidized to a low leakage current, which makes it possible to use this material for capacitor fabrication. Experimental data are given for the metal/oxide/metal thin-film capacitor. A new "printing" technique especially suited for the fabrication of film capacitors in printed microminiaturized electronic circuits is described for the forming of the dielectric oxide layer.

Published in:

IRE Transactions on Component Parts  (Volume:8 ,  Issue: 2 )