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Electron Beam Cutting Techniques for Electronic Applications

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1 Author(s)
F. Schollhammer ; United Aircraft Corporation

The advantages of electron beam cutting are outlined. Specific production applications of these cutting techniques to electronic packaging are discussed in detail. Examples presented include: the etching of micro components; the scribing of thin films; the drilling and cutting of precision holes and slots in ceramic components; and the use of the electron beam cutter as a salvage tool.

Published in:

IEEE Transactions on Product Engineering and Production  (Volume:7 ,  Issue: 2 )