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The Application of Magnetically Enhanced Sputtering in a Production Cylindrical Sputtering System

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1 Author(s)
Arcidiacono, F. ; Western Electric Company,North Andover,MA

A Penning cylindrical sputtering geometry has been used for the production of tantalum thin films. A simple magnetic field-shaping technique coupled with proper target design has produced films with a uniformity characteristic of a quality deposit. The technique has proven to be a cost effective way of producing a high throughput of product in a system designed for a cylindrical sputtering mode.

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Parts, Hybrids, and Packaging, IEEE Transactions on  (Volume:13 ,  Issue: 3 )