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Thin-Film Titanium Dioxide Capacitors for Microelectronic Applications

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1 Author(s)
Keister, F. ; Hughes Aircraft Company

This paper discusses investigations of vacuum-deposited thin-film titanium dioxide capacitors applicable to microelectronic circuits. Included are sections covering evaporant materials and their purities, vacuum evaporation techniques, anodizing procedures, substrate materials, and electrical properties of thin-film TiO2capacitors.

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Component Parts, IEEE Transactions on  (Volume:12 ,  Issue: 1 )