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Understanding manufacturing process variation with multi-vari analysis

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1 Author(s)
Bobbitt, C.E., Jr. ; Motorola Inc., Phoenix, AZ, USA

A statistical method that allows for simplicity of design and complements other statistical methods called multi-vari analysis (MVA) is described. MVA can be applied to virtually any manufacturing process. The results produced from this type of study give the engineer a good understanding of the manufacturing process. With this technique, engineers can determine manufacturing process capability and decide what steps need to be taken for further process control or improvement. The steps in performing a MVA process characterization study are given. MVA graphing and graph analysis and other uses for MVA data are discussed

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Date of Conference:

11-12 Sep 1990