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Performance analysis of multi-process semiconductor manufacturing equipment

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4 Author(s)
R. W. Atherton ; In-Motion Technol. Inc., Mountain View, CA, USA ; F. T. Turner ; L. F. Atherton ; M. A. Pool

A general dynamic model of the cycle-time performance of production integrated processing equipment (PIPE) is discussed. This model has been used to analyze the performance of existing PIPE designs and to derive design enhancements. The performance predictions of the model are compared to measurements of PIPE operation. Case studies of PIPE operation indicate possible production advantages over conventional equipment

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Date of Conference:

11-12 Sep 1990