Referenced Items are not available for this document.
A procedure for carrying out a measurement system capability study is presented. The tool is first calibrated against a known standard. Then, the tool's short-term repeatability is determined. A reproducibility evaluation is performed, stability is evaluated over time, and statistical process control is implemented. Key terminology in measurement capability studies is reviewed. Example formulas for a variance components analysis in the simple case where operators are the only source of variation are given
Published in:
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Date of Conference: 11-12 Sep 1990
- Page(s):
- 121 - 125
- Meeting Date :
- 11 Sep 1990-12 Sep 1990
- INSPEC Accession Number:
- 3966503
- Conference Location :
- Danvers, MA
- Digital Object Identifier :
- 10.1109/ASMC.1990.111235
- Product Type:
- Conference Publications
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