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Measurement system capability analysis

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1 Author(s)
Potter, R.W. ; SEMATECH/AT&T, Austin, TX, USA

A procedure for carrying out a measurement system capability study is presented. The tool is first calibrated against a known standard. Then, the tool's short-term repeatability is determined. A reproducibility evaluation is performed, stability is evaluated over time, and statistical process control is implemented. Key terminology in measurement capability studies is reviewed. Example formulas for a variance components analysis in the simple case where operators are the only source of variation are given

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Date of Conference:

11-12 Sep 1990