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A comprehensive IC yield analysis system in RS1

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2 Author(s)
Trahan, R. ; Motorola Inc., Austin, TX, USA ; Dean, K.

A software-based solution for integrated-circuit (IC) yield analysis is presented. A methodology for the incorporation of process test insert, product test, and product yield data from various sources is given. This information is then formatted into a common database, specifically RS1, where both RS1 and company-generated software procedures can perform statistical yield analysis on chosen data. System features highlighted include automatic operation, modular architecture for expansion, SPC, and yield reporting capabilities. Several examples of product yield enhancements utilizing test structure data and system procedures are presented

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Date of Conference:

11-12 Sep 1990

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