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The gigabit chip: required manufacturing approaches

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1 Author(s)
Burke, J.R. ; Semiconductor Res. Corp., Research Triangle Park, NC, USA

Some of the objectives of the Semiconductor Research Corporation (SRC), which is a consortium whose full members include most of the major integrated circuit and equipment producing companies in the United States, are discussed. The SRC research program is discussed. The long range objectives of producing a prototype DRAM with a density of 256 Mb and a prototype 1-Gb DRAM chip are discussed. Other goals and economics are discussed

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Date of Conference:

11-12 Sep 1990