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Direct coupling system between nanometer world and human world

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2 Author(s)
Hatamura, Yotaro ; Dept. of Mech. Eng. for Production, Tokyo Univ., Japan ; Morishita, H.

A nanomanipulator system, called the nanorobot system, which allows humans to experience the nanometer world with their own sensitivities is proposed. The nanorobot system consists of left and right hand robots with highly sensitive force sensors in the chamber of stereo scanning electron microscope (SEM) which gives three-dimensional magnified image of the process site. A prototype of the nanorobot system is described. The effectiveness of the prototype system is demonstrated by the production of a microswitch in an aluminum substrate

Published in:

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Date of Conference:

11-14 Feb 1990