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Positioning and measurement using a crystalline lattice reference scale-a feasibility study of STM application to MEMS

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4 Author(s)
Kawakatsu, Hideki ; Inst. of Ind. Sci., Tokyo Univ., Japan ; Hoshi, Yasuo ; Kitano, Hitoshi ; Higuchi, T.

A regular crystalline lattice is proposed for use as a universal reference scale for positioning and measurement of micro-electro-mechanical systems (MEMS). The metrological application of crystalline lattice is investigated by using a dual tunneling-unit scanning tunneling microscope (DTU STM), which can observe two crystalline surfaces at once using a single lateral XY scanner. The basic ideas of positioning and measurement using a crystal as a scale are introduced. The method of lateral tip servo control to realize position lock over an atom are discussed. The structure of the DTU STM and a rough positioning mechanism for a coarse-tip approach driven by an impact force are introduced

Published in:

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Date of Conference:

11-14 Feb 1990