Cart (Loading....) | Create Account
Close category search window
 

Analytical modelling of electrostatic structures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Mahadevan, R. ; AT&T Bell Lab., Holmdel, NJ, USA

In order to design or predict the performance of a cylindrical planetary electrostatic motor it is necessary to analyze the torque generated by such a structure. A simple, but sufficiently accurate analytical model is developed for use in design. Conformal mappings used to model the capacitance and torque of the motor as a function of the rotor position, using a quasi-static, two-dimensional approximation. The effect of an insulating dielectric layer on the stator or rotor is evaluated. The approximate analytical models are corroborated using two-dimensional finite element simulations for representative motor geometries. The capacitance of different capacitive encoder structures are analyzed. Encoder structures compatible with silicon micromachining are considered and comprise electrodes with rectangular and triangular grooves. Conformal mappings are used to calculate the maximum and minimum capacitance of these electrode structures. The results of the analysis are corroborated by calculations using boundary integral methods, for chosen encoder geometries

Published in:

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Date of Conference:

11-14 Feb 1990

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.