Automatic generation of a 3-D solid model of a microfabricated structure

The automatic construction of a 3-D solid model from a specification of mask layout and process sequence is demonstrated. The process sequence consists of planar deposition and masked etch. The generated 3-D solid model is directly usable by mechanical CAD software and is used to do a deformation analysis of the structure. An overview of the CAD system is given, and the structure simulator is described in detail.<
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