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Stimulation of diamond growth on optically transparent non-conductive substrates

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9 Author(s)
Kadlecikova, M. ; Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia ; Breza, J. ; Vesely, M. ; Luptakova, V.
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Diamond layers have been deposited by hot filament CVD on sapphire and glass substrates pre-treated by diamond grain seeding and by AC biasing. The quality of diamond layers has been evaluated by Raman spectroscopy. Diamond layers of different quality have been obtained as confirmed by detecting various Raman bands attributable to different forms of carbon.

Published in:

Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on

Date of Conference:

14-16 Oct. 2002