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Studies of dielectric characteristics of spin-coated polyimide films

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1 Author(s)
Matay, L. ; Dept. of Electron Beam Lithography & Microstructuring, Slovak Acad. of Sci., Bratislava, Slovakia

Dielectric properties of HTR-3 and PAAC-16 polyimide thin films with thickness ranging from 0.95 to 2.4 μm have been measured in the frequency range from 50 kHz to 14 MHz by using a small electrode in MPM system. The frequency dependence of ac conductivity for polyimide HTR-3 and PAAC-16 with thickness of polyimide film about 1.4 μm was measured at room temperature. The curves exhibit two dispersive regions in which they had different slope. The dielectric loss and dissipation factor (tan δ) decrease in the frequency range <400 kHz and increase in the frequency range >400 kHz. With decreasing polyimide film thickness, the dielectric constant decreased.

Published in:

Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on

Date of Conference:

14-16 Oct. 2002