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High-Q selective filters using mechanical resonance of silicon beams

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2 Author(s)

The theory of integrated high- Q selective filters based on the mechanical resonance of single silicon beams is presented. The method for transfer function calculation is developed, and it is shown that the silicon beam filters have high- Q selective characteristics. A construction procedure based on anisotropic etching of silicon and classical integrated technology is proposed.

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IEEE Transactions on Circuits and Systems  (Volume:25 ,  Issue: 4 )