New Submicron (0.5-1.0 mum diam) bubble garnets have been developed. In order to reduce saturation induction4piMsas low as possible, suitable choice of amounts of nonmagnetic ions substituting for ferric ions in both tetrahedral and octahedral sites were studied in (YSm)3(FeAl)5O12, (YSmLu)3- (FeGaSc)5O12, (YSmLu)3(FeAlSc)5O12and (LaLuSm)3- (FeGa)5O12garnet systems. For example, in (YSmLu)3- (FeAlSc)5O12a film with the following properties was grown; strip widthw = 0.7mum, film thicknessh= 0.7mum, quality factorq=2.8, Curie temperatureTc= 140degC and4piMs=770G. The temperature properties of those films could be improved drastically by doping with a small amount of Gd ion. Wall mobilities μw of those films are in the region from 200 to 500cm/s/Oe. Preceding these material studies, several film characterization methods have been investigated. Film thickness was measured by Fluorescent X-ray method, strip width by using a highly sensitivity TV camera, and bubble collapse field by FMR resonance technique respectively.