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The simultaneous multiple dipping of magnetic bubble garnets

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2 Author(s)
Blank, S.L. ; Bell Laboratories, Murry Hill, NJ ; Licht, S.J.

The simultaneous growth of LPE films on two-inch diameter Gd3Ga5O12substrates with nominal film compositions in the (YLuSmCa)3(FeGe)5O12system is studied. The effective distribution coefficients of Ca2+-Ge4+, Y3+, Lu3+and Sm3+are discussed and related to the magnetic property variations observed as a function of film growth rate. The approaches for material property control are evaluated and examples given of expected property variation within a stack of epi wafers grown under constant thickness or constant growth rate conditions. A design is shown for a 18 at-a-time and a 30 at-a-time growth holder. Data is presented to indicate the radial thickness uniformity, thickness, saturation magnetization, collapse field and anisotropy field variation typically observed in multiple substrate film growth. A technique for minimizing flux caused mesa formation is evaluated. with comparative data showing the effectiveness of this technique.

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Magnetics, IEEE Transactions on  (Volume:16 ,  Issue: 5 )