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A 64K (8K/spl times/8) fully-static ROM has been developed using DSA E/D MOS technology. The ROM bit pattern is programmed on the diffusion mask. A new address decoder circuit has been designed and implemented in the device. ROM cell size is 11.5/spl times/15 /spl mu/m, and chip size is 5.05/spl times/5.05 mm.