Microfabrication of high-aspect ratio and complex monolithic structures in glass

We present a novel approach for the realization of complex three-dimensional microstructures in brittle materials, like glass. Our technology is based on a beam of eroding powder particles, etching a masked rotating substrate. By using an oblique powder beam and mask under-etching effects, we fabricate monolithic millimeter-high microstructures with an aspect ratio of 5 to 10. This intrinsically very simple microfabrication method also allows to realize in a unique way free-standing monolithic glass microstructures, suspended over many millimeters.