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Pressure sensor based on distributed temperature sensing

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6 Author(s)
van Baar, J.J. ; MESA Res. Inst., Twente Univ., Enschede, Netherlands ; Wiegerink, R.J. ; Berenschot, J.W. ; Lammerink, T.S.J.
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A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in to account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.

Published in:
Sensors, 2002. Proceedings of IEEE  (Volume:2 )

Date of Conference: 2002

Page(s):
964 - 968 vol.2
Print ISBN:
0-7803-7454-1
INSPEC Accession Number:
7529171
Digital Object Identifier :
10.1109/ICSENS.2002.1037240
Product Type:
Conference Publications

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